Scope of Workshop

  • Plasma-based Atomic Layer Deposition (ALD): fundamentals & applications
  • Plasma-based Atomic Layer Etching (ALE): fundamentals & applications
  • Surface chemistry of self-limiting reactions
  • Liquid-based atomic-scale material processes
  • Control of low-pressure plasmas for low-damage processing
  • Modeling and diagnostics of low-pressure plasmas for low-damage processing