Call for Abstracts

Abstract Submission

  • Post-deadline abstracts (mostly poster presentations) are now welcomed to be submitted.
Post-deadline abstracts Submission Deadline : October 16, 2017 24:00(JST, GMT+9:00)

You will be notified of the Abstract Submission Number by automatic e-mail when the submission is completed. If by any chance the confirmation email does not reach you, please contact the secretariat at

A prospective participant who wishes to present his/her paper is requested to submit an Extended Abstract, 1 or 2 page(s) in length on A4 paper, in English, by uploading it though the "Abstract Submission Site" below.

  • Refer to the prescribed format as indicated below:
  • Name your file as "(family name of the corresponding author).pdf", such as "smith.pdf"
  • Embed ALL fonts in your PDF file. The size of each pdf file must not exceed 10 Mbytes.
  • Upload your abstract file in the "Abstract Submission Site", together with other information on the abstract. If you have any problem in upload the file and/or inputting the required information, please contact the Organizing Committee at
  • Each registered participant is allowed to present only one paper (either oral or poster) in the WORKSHOP.
Please note that the registered participant of the 82nd IUVSTA Workshop on Plasma-based Atomic Layer Processes can also attend the 10th EU-Japan Symposium on Plasma Processing free of charge.

Session Categories

  • Plasma-based Atomic Layer Deposition (ALD): fundamentals & applications
  • Plasma-based Atomic Layer Etching (ALE): fundamentals & applications
  • Surface chemistry of self-limiting reactions
  • Liquid-based atomic-scale material processes
  • Control of low-pressure plasmas for low-damage processing
  • Modeling and diagnostics of low-pressure plasmas for low-damage processing
  • Other topics on atomic-scale/low-damage plasma processing

Possible Financial Support for Full-time Students : Depending on the students' needs and funding availability, the registration fees of full-time students who present their work may be reduced or waived. If you are a student and request possible financial support, please contact the the secretariat at after submitting your abstract.